FOUP Airflow Inspection Machine
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AOI Automated Optical Inspection AI
FOUP Airflow Inspection Machine
This equipment is specifically designed for FOUP airflow velocity measurement and tube alignment detection. It is equipped with a high-precision anemometer and image analysis system, supporting data logging and tri-color light display to ensure inspection accuracy. The equipment is compact, user-friendly, and comes with a full warranty and after-sales service.
| Number of Cameras | 2 sets |
|---|---|
| Image Resolution | 20 μm |
| Field of View (FOV) | 40 mm x 48 mm |
| Measurement Content | FOUP internal airflow velocity and internal tube misalignment detection |
| Control System | PC |